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運動控制系統(tǒng)驅(qū)動器電機執(zhí)行器|電動推桿|電動缸直線運動系統(tǒng)高精密定位平臺精密轉(zhuǎn)臺ABRT-400空氣軸承精密直驅(qū)轉(zhuǎn)臺ABRS系列空氣軸承精密直驅(qū)轉(zhuǎn)臺ARA1000空氣軸承精密直驅(qū)轉(zhuǎn)臺ABRT系列空氣軸承精密直驅(qū)轉(zhuǎn)臺ADRH機械軸承精密直驅(qū)轉(zhuǎn)臺ASR1000機械軸承精密直驅(qū)轉(zhuǎn)臺ASR1100機械軸承精密直驅(qū)轉(zhuǎn)臺ASR1200機械軸承精密直驅(qū)轉(zhuǎn)臺CCS 機械軸承精密直驅(qū)轉(zhuǎn)臺ACS 機械軸承精密直驅(qū)轉(zhuǎn)臺ACS LP 機械軸承精密直驅(qū)轉(zhuǎn)臺ANT95-R 單軸直驅(qū)納米定位轉(zhuǎn)臺ANT130-R 單軸直驅(qū)納米定位轉(zhuǎn)臺ADRS 機械軸承精密直驅(qū)轉(zhuǎn)臺ADRT 機械軸承精密直驅(qū)轉(zhuǎn)臺APR 機械軸承精密直驅(qū)轉(zhuǎn)臺ASRT 機械軸承精密直驅(qū)轉(zhuǎn)臺ARMS 機械軸承精密直驅(qū)轉(zhuǎn)臺ALAR 機械軸承精密直驅(qū)轉(zhuǎn)臺WaferMax T機械軸承精密直驅(qū)轉(zhuǎn)臺AXR 雙軸精密轉(zhuǎn)臺組件MPS-GR 機械軸承蝸輪蝸桿轉(zhuǎn)臺AGR 機械軸承蝸輪蝸桿轉(zhuǎn)臺精密直線定位平臺精密 X-Y 直線定位平臺精密升降平臺和Z軸平臺陶瓷電機驅(qū)動納米定位平臺行星減速機直線軸承和直線導軌滾珠絲杠和梯形絲杠精密滾珠測量反饋裝置精密電主軸機器人關(guān)節(jié)模組
ANT130-R 單軸直驅(qū)納米定位轉(zhuǎn)臺 | ANT130-R Series Single-Axis Rotary Direct-Drive Nanopositioning Stages
ANT130-R和ANT130-R-PLUS直驅(qū)轉(zhuǎn)臺被設(shè)計成Aerotech納米運動技術(shù)產(chǎn)品家族的一部分。我們的轉(zhuǎn)臺提供了史無前例的定位穩(wěn)定性（0.005角秒）和0.01角秒的增量運動性能，并提供兩種等級的精度。

ANT130-R Series Specifications

Model ANT130-
20-R 		ANT130-
20-R-PLUS 		ANT130-
180-R 		ANT130-
180-R-PLUS 		ANT130-
360-R 		ANT130-
360-R-PLUS
Rotation Angle 20° 20° 180° 180° ±360° Continuous ±360° Continuous
Accuracy(1) 10 arc sec 3 arc sec 10 arc sec 3 arc sec 10 arc sec 3 arc sec
Resolution 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec 0.01 arc sec
Bidirectional Repeatability(1) 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec 1.5 arc sec
Unidirectional Repeatability 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec 0.5 arc sec
Tilt Error Motion Synchronous N/A N/A N/A N/A 10 arc sec 10 arc sec
Asynchronous N/A N/A N/A N/A 3 arc sec 3 arc sec
Axial Error Motion(1) Synchronous N/A N/A N/A N/A 2 μm 2 μm
Asynchronous N/A N/A N/A N/A 0.5 μm 0.5 μm
Radial Error Motion(1) Synchronous N/A N/A N/A N/A 3 μm 3 μm
Asynchronous N/A N/A N/A N/A 1 μm 1 μm
Maximum Speed 20 rpm 20 rpm 20 rpm 20 rpm 200 rpm 200 rpm
Maximum Acceleration 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2 400 rad/s2
In-Position Stability(2) 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec 0.005 arc sec
Aperture 11 mm 11 mm 11 mm 11 mm 11 mm 11 mm
Maximum Torque (Continuous) 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m 0.2 N-m
Load Capacity(3) Axial 3.0 kg 3.0 kg 3.0 kg 3.0 kg 3.0 kg 3.0 kg
Radial 2.0 kg 2.0 kg 2.0 kg 2.0 kg 2.0 kg 2.0 kg
Moment 3 N-m 3 N-m 3 N-m 3 N-m 3 N-m 3 N-m
Rotor Inertia (Unloaded) 0.001 kg-m2 0.001 kg-m2 0.001 kg-m2 0.001 kg-m2 0.0016 kg-m2 0.0016 kg-m2
Stage Mass 1.5 kg 1.5 kg 1.5 kg 1.5 kg 1.7 kg 1.7 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage. Requires the use of an Aerotech controller.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
  • All error motion specifications are measured at 60 rpm.
  • For high speed operation customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

Drive System Slotless, Brushless, Direct-Drive Rotary Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25oC/24 hours. If this is not possible alternate products are available. Please consult Aerotech for more information.

  • ANT130-R Step Plot
  • ANT130-R Series Specifications Images

Dimensions

  • ANT130-R/ANT130-R-PLUS

Ordering Information

ANT130-R Series Rotary Stage

Option Description
ANT130-R Aerotech direct-drive rotary positioner

Rotary Stage Travel

Option Description
ANT130-20-R 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops
ANT130-20-R-PLUS 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version)
ANT130-180-R 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops
ANT130-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder, optical limits and hard stops (high accuracy version)
ANT130-360-R 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits
ANT130-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder and optical limits (high accuracy version)

Options

Option Description
-MP Breadboard mounting plate