ANT130-5-V 納米定位升降平臺 | 機械軸承直線電機直驅納米定位垂直升降平臺 | ANT130-5-V Single-Axis Lift Direct-Drive Nanopositioning Stage | ANT130-5-V Series Mechanical Bearing, Linear Motor Vertical Stage
Aerotech ANT series stages are the world first nanometer-level positioning systems with multi-millimeter travel. The ANT130-V and ANT130-V-PLUS are linear-motor-driven wedge-style vertical lift stages. The stages are designed to be seamlessly integrated with other stages in the ANT130 family for superior multi-axis performance and are offered in two accuracy grades.
Mechanical Specifications
| Model | ANT130-5-V | ANT130-5-V-PLUS |
|---|---|---|
| Travel | 5 mm | |
| Accuracy(1) | ±2 μm | ±200 nm |
| Resolution | 2 nm | |
| Bidirectional Repeatability(1) | ±150 nm | ±100 nm |
| Unidirectional Repeatability | ±75 nm | |
| Straightness(2) | ±1.0 μm | |
| Pitch(1) | 20 arc sec | |
| Roll | 10 arc sec | |
| Yaw(1) | 10 arc sec | |
| Maximum Speed | 75 mm/s | |
| Maximum Acceleration | 0.7 g (No Load) | |
| Settling Time | See graphs for typical performance | |
| In-Position Stability(3) | <2 nm | |
| Maximum Force (Continuous) | 100 N | |
| Load Capacity(4) | 3.0 kg | |
| Moving Mass | 1.8 kg | |
| Stage Mass | 3.1 kg | |
| Material | Aluminum Body/Black Hardcoat Finish/Black Anodize Finish | |
| MTBF (Mean Time Between Failure) | 30,000 Hours | |
- Certified with each stage.
- Measured perpendicular or parallel to wedge direction.
- In-Position Stability listing is 3 sigma value.
- Assumes loading along axis of travel.
- Specifications are per axis measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Electrical Specifications
| Drive System | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder |
| Maximum Bus Voltage | ±40 VDC |
| Limit Switches | 5 V, Normally Closed |
| Home Switch | Near Center |
Recommended COntroller
| Multi-Axis | A3200 |
Npaq MXR Npaq MR-MXH Ndrive ML-MXH |
| Ensemble |
Epaq MXH Epaq MR-MXH Ensemble ML-MXH |
|
| Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.
Dimensions
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ANT130-5-V
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Mounting Plate Dimensions
Ordering Information
ANT130-V Series Lift Stage
| Option | Description |
|---|---|
| ANT130-V/ANT130-V-PLUS | Aerotech’s nanotranslation crossed-roller bearing vertical lift positioner |
Linear Stage Travel
| Option | Description |
|---|---|
| ANT130-5-V | 5 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vppsinusoidal output linear encoder and limits |
| ANT130-5-V-PLUS | 5 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vppsinusoidal output linear encoder and limits (High Accuracy Version) |
Output Cable Connectors
| Option | Description |
|---|---|
| -25DU | Single 25-pin D connector (standard) |
| -4DU-25DU | 4-pin HPD and 25-pin D connectors |
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.
Options
| Option | Description |
|---|---|
| -MP | Breadboard mounting plate |