● 雙向重復性達75納米
● 超精密運動所需要的直接驅(qū)動直線電機
● 高精度非接觸式玻璃尺的線性編碼器
● 平滑運動所需要的抗籠蠕變交叉滾子軸承
● 小尺寸機構展現(xiàn)出色性能
● 平滑運動所需的直線伺服電機
直線電機驅(qū)動
Unlike many stages that utilize a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or "stiction" that is normally associated with a lead screw or ball-screw drive.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.
出眾的分辨率
For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls.
The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provide excellent in-position stability.
優(yōu)異的幾何特性
Aerotech ultra-stiff construction and compact two-piece design result in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±1 μm over the entire travel.
平滑行程
Designed for smooth, vibration-free motion, the ALS130H utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.
長壽命設計
Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.
精確校準
ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.