● 直接驅(qū)動(dòng)直線電機(jī)帶來(lái)平滑和精密的運(yùn)動(dòng)
● 兼容450毫米晶圓
● 長(zhǎng)壽命直線運(yùn)動(dòng)導(dǎo)軌軸承系統(tǒng)
● 十二型號(hào)，行程從100毫米到1.5米
● 側(cè)密封設(shè)計(jì)提供卓越的碎片防護(hù)
● 低成本，高性能的平臺(tái)
結(jié)構(gòu)特點(diǎn)
Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability and long life. Both the metal waycover and tabletop are treated with a hardcoat that is scratch-resistant and provides outstanding protection in the harshest applications. The tabletop utilizes stainless steel Helicoil® inserts to protect mounting holes against thread wear. Several tabletop options are available for metric or English mounting, as well as for direct interface with our popular ADRS, ADRT and AGR rotary stages. In addition, configurable cable management options are available for single- or multi-axis systems.
直線電機(jī)驅(qū)動(dòng)
Aerotech’s high-power, cog-free, BLM series linear motor drives the PRO225LM. The non-magnetic forcer coil provides high force with zero cogging for super-smooth velocity and position control. This zero cogging design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction and outstanding system responsiveness. The magnetic field of the linear motor is totally self-contained within the U-channel design. Many high-performance applications cannot tolerate the stray magnetic fields generated by flat motor magnet tracks.
高性能
Noncontact linear encoders with micron-level repeatabilities are standard on all PRO225LM series stages. Either a line-driver output or amplified sine-wave output encoder is available.
The optional HALAR factory calibration further increases the standard accuracy and repeatability. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.